Optimization of self-aligned double patterning (SADP)-compliant layout designs using pattern matching for sub-20nm metal routing
spiedigitallibrary.org
Optimization of self-aligned double patterning (SADP)-compliant layout designs using pattern matching for sub-20nm metal routing
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Mar 30, 2017
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Have you seen our video on multiple patterning? Several clever multiple patterning strategies have been developed to create tiny, densely packed features on chips. Check out our video to learn how the techniques work! | Lam Research Corporation
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