Abstract: This paper presents a 28 GHz front-end module(FEM) incorporating a deep back-off doherty power amplifier (DPA). With a size ratio of 1:2 between the main and auxiliary amplifiers, the ...
Abstract: Wafer fabrication is a critical process in semiconductor manufacturing. Cluster tools with Equipment Front-End Module (EFEM) are widely used in wafer fabrication. These tools consist of a ...
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