Abstract: The magnetic levitation turbo molecular pump (MLTMP) is driven by a high-speed permanent magnet synchronous motor to create a high-vacuum environment for semiconductor manufacturing and ...
Abstract: In this paper, a real-time compensation scheme of the dynamic load position error (DLPE) due to the elastic coupings between the driving motor and load of a ...
The Nature Index 2025 Research Leaders — previously known as Annual Tables — reveal the leading institutions and countries/territories in the natural and health sciences, according to their output in ...
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